Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties
Research output: Contribution to conference › Presentation › Research › peer-review
Standard
Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties. / Saringer, Christian.
2017. 44th International Conference on Metal Coatings and Thin Films 2017, San Diego, United States.
2017. 44th International Conference on Metal Coatings and Thin Films 2017, San Diego, United States.
Research output: Contribution to conference › Presentation › Research › peer-review
Harvard
Saringer, C 2017, 'Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties', 44th International Conference on Metal Coatings and Thin Films 2017, San Diego, United States, 23/04/17 - 28/04/17.
APA
Saringer, C. (2017). Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties. 44th International Conference on Metal Coatings and Thin Films 2017, San Diego, United States.
Vancouver
Saringer C. Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties. 2017. 44th International Conference on Metal Coatings and Thin Films 2017, San Diego, United States.
Author
Bibtex - Download
@conference{2e8babe9c6084406a4749f3a29876117,
title = "Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties",
author = "Christian Saringer",
year = "2017",
month = apr,
day = "25",
language = "English",
note = "44th International Conference on Metal Coatings and Thin Films 2017 ; Conference date: 23-04-2017 Through 28-04-2017",
}
RIS (suitable for import to EndNote) - Download
TY - CONF
T1 - Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties
AU - Saringer, Christian
PY - 2017/4/25
Y1 - 2017/4/25
M3 - Presentation
T2 - 44th International Conference on Metal Coatings and Thin Films 2017
Y2 - 23 April 2017 through 28 April 2017
ER -
