Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties
Publikationen: Konferenzbeitrag › Vortrag › Forschung › (peer-reviewed)
Standard
Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties. / Saringer, Christian.
2017. 44th International Conference on Metal Coatings and Thin Films 2017, San Diego, USA / Vereinigte Staaten.
2017. 44th International Conference on Metal Coatings and Thin Films 2017, San Diego, USA / Vereinigte Staaten.
Publikationen: Konferenzbeitrag › Vortrag › Forschung › (peer-reviewed)
Harvard
Saringer, C 2017, 'Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties', 44th International Conference on Metal Coatings and Thin Films 2017, San Diego, USA / Vereinigte Staaten, 23/04/17 - 28/04/17.
APA
Saringer, C. (2017). Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties. 44th International Conference on Metal Coatings and Thin Films 2017, San Diego, USA / Vereinigte Staaten.
Vancouver
Saringer C. Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties. 2017. 44th International Conference on Metal Coatings and Thin Films 2017, San Diego, USA / Vereinigte Staaten.
Author
Bibtex - Download
@conference{2e8babe9c6084406a4749f3a29876117,
title = "Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties",
author = "Christian Saringer",
year = "2017",
month = apr,
day = "25",
language = "English",
note = "44th International Conference on Metal Coatings and Thin Films 2017 ; Conference date: 23-04-2017 Through 28-04-2017",
}
RIS (suitable for import to EndNote) - Download
TY - CONF
T1 - Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties
AU - Saringer, Christian
PY - 2017/4/25
Y1 - 2017/4/25
M3 - Presentation
T2 - 44th International Conference on Metal Coatings and Thin Films 2017
Y2 - 23 April 2017 through 28 April 2017
ER -
