Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties
Research output: Contribution to conference › Presentation › Research › peer-review
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Details
| Original language | English |
|---|---|
| Publication status | Published - 25 Apr 2017 |
| Event | 44th International Conference on Metal Coatings and Thin Films 2017 - San Diego, United States Duration: 23 Apr 2017 → 28 Apr 2017 |
Conference
| Conference | 44th International Conference on Metal Coatings and Thin Films 2017 |
|---|---|
| Abbreviated title | 44th ICMCTF |
| Country/Territory | United States |
| City | San Diego |
| Period | 23/04/17 → 28/04/17 |
