Topographical and structural investigations of phosphorous-doped silicon films
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| Translated title of the contribution | Topographical and structural investigations of phosphorous-doped silicon films |
|---|---|
| Original language | English |
| Pages (from-to) | 999-1002 |
| Journal | Applied physics / A (Series A, Materials science & processing) |
| Volume | 66 |
| Publication status | Published - 1998 |
