Topographical and structural investigations of phosphorous-doped silicon films
Research output: Contribution to journal › Article › Research › peer-review
Standard
Topographical and structural investigations of phosphorous-doped silicon films. / Sorschag, K; Gold, H; Lutz, J et al.
In: Applied physics / A (Series A, Materials science & processing), Vol. 66, 1998, p. 999-1002.
In: Applied physics / A (Series A, Materials science & processing), Vol. 66, 1998, p. 999-1002.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Sorschag, K, Gold, H, Lutz, J, Kuchar, F, Pippan, M & Noll, H 1998, 'Topographical and structural investigations of phosphorous-doped silicon films', Applied physics / A (Series A, Materials science & processing), vol. 66, pp. 999-1002.
APA
Sorschag, K., Gold, H., Lutz, J., Kuchar, F., Pippan, M., & Noll, H. (1998). Topographical and structural investigations of phosphorous-doped silicon films. Applied physics / A (Series A, Materials science & processing), 66, 999-1002.
Vancouver
Sorschag K, Gold H, Lutz J, Kuchar F, Pippan M, Noll H. Topographical and structural investigations of phosphorous-doped silicon films. Applied physics / A (Series A, Materials science & processing). 1998;66:999-1002.
Author
Bibtex - Download
@article{5339a2110f5b4debb0c05adc85223372,
title = "Topographical and structural investigations of phosphorous-doped silicon films",
author = "K Sorschag and H Gold and J Lutz and Friedemar Kuchar and M Pippan and H Noll",
year = "1998",
language = "English",
volume = "66",
pages = "999--1002",
journal = "Applied physics / A (Series A, Materials science & processing)",
issn = "0340-3793",
publisher = "Springer Berlin",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Topographical and structural investigations of phosphorous-doped silicon films
AU - Sorschag, K
AU - Gold, H
AU - Lutz, J
AU - Kuchar, Friedemar
AU - Pippan, M
AU - Noll, H
PY - 1998
Y1 - 1998
M3 - Article
VL - 66
SP - 999
EP - 1002
JO - Applied physics / A (Series A, Materials science & processing)
JF - Applied physics / A (Series A, Materials science & processing)
SN - 0340-3793
ER -
