Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems
Research output: Contribution to journal › Article › Research › peer-review
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| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 245-252 |
| Journal | Acta Materialia |
| Volume | 191 |
| DOIs | |
| Publication status | Published - Jun 2020 |
