Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems

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Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems. / Coleman, Kathleen; Bermejo, Raul; Leguillon, Dominique et al.
In: Acta Materialia, Vol. 191, 06.2020, p. 245-252.

Research output: Contribution to journalArticleResearchpeer-review

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Coleman K, Bermejo R, Leguillon D, Trolier-McKinstry S. Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems. Acta Materialia. 2020 Jun;191:245-252. doi: 10.1016/j.actamat.2020.03.030

Bibtex - Download

@article{f725c5baa1f9461e868bcb76543b2b1e,
title = "Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems",
keywords = "Thin film, PZT, Cracking, Stress criterion, Biaxial bending",
author = "Kathleen Coleman and Raul Bermejo and Dominique Leguillon and Susan Trolier-McKinstry",
year = "2020",
month = jun,
doi = "10.1016/j.actamat.2020.03.030",
language = "Undefined/Unknown",
volume = "191",
pages = "245--252",
journal = "Acta Materialia",
issn = "1359-6454",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems

AU - Coleman, Kathleen

AU - Bermejo, Raul

AU - Leguillon, Dominique

AU - Trolier-McKinstry, Susan

PY - 2020/6

Y1 - 2020/6

KW - Thin film, PZT, Cracking, Stress criterion, Biaxial bending

UR - https://doi.org/10.1016/j.actamat.2020.03.030

U2 - 10.1016/j.actamat.2020.03.030

DO - 10.1016/j.actamat.2020.03.030

M3 - Article

VL - 191

SP - 245

EP - 252

JO - Acta Materialia

JF - Acta Materialia

SN - 1359-6454

ER -