The origin of stresses in magnetron-sputtered thin films with zone T structures

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Authors

Translated title of the contribution	The origin of stresses in magnetron-sputtered thin films with zone T structures
Original language	English
Pages (from-to)	2621-2633
Journal	Acta materialia
Volume	58
DOIs	https://doi.org/10.1016/j.actamat.2009.12.048
Publication status	Published - 2010