The origin of stresses in magnetron-sputtered thin films with zone T structures

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The origin of stresses in magnetron-sputtered thin films with zone T structures. / Daniel, Rostislav; Martinschitz, Klaus; Keckes, Jozef et al.
In: Acta materialia, Vol. 58, 2010, p. 2621-2633.

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@article{3e40a22d583a4a8680604aae6cd6b614,
title = "The origin of stresses in magnetron-sputtered thin films with zone T structures",
author = "Rostislav Daniel and Klaus Martinschitz and Jozef Keckes and Christian Mitterer",
year = "2010",
doi = "10.1016/j.actamat.2009.12.048",
language = "English",
volume = "58",
pages = "2621--2633",
journal = "Acta materialia",
issn = "1359-6454",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - The origin of stresses in magnetron-sputtered thin films with zone T structures

AU - Daniel, Rostislav

AU - Martinschitz, Klaus

AU - Keckes, Jozef

AU - Mitterer, Christian

PY - 2010

Y1 - 2010

U2 - 10.1016/j.actamat.2009.12.048

DO - 10.1016/j.actamat.2009.12.048

M3 - Article

VL - 58

SP - 2621

EP - 2633

JO - Acta materialia

JF - Acta materialia

SN - 1359-6454

ER -