The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings

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Authors

Translated title of the contribution	The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings
Original language	English
Pages (from-to)	120-126
Journal	International journal of refractory metals & hard materials
Volume	26
DOIs	https://doi.org/10.1016/j.ijrmhm.2007.01.010
Publication status	Published - 2008