The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings

Research output: Contribution to journalArticleResearchpeer-review

Authors

  • Josef Wagner
  • M. Penoy
  • C. Michotte
  • Martin Kathrein

Details

Translated title of the contributionThe effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings
Original languageEnglish
Pages (from-to)120-126
JournalInternational journal of refractory metals & hard materials
Volume26
DOIs
Publication statusPublished - 2008