The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings
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In: International journal of refractory metals & hard materials, Vol. 26, 2008, p. 120-126.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings
AU - Wagner, Josef
AU - Mitterer, Christian
AU - Penoy, M.
AU - Michotte, C.
AU - Wallgram, Wilfried
AU - Kathrein, Martin
PY - 2008
Y1 - 2008
U2 - 10.1016/j.ijrmhm.2007.01.010
DO - 10.1016/j.ijrmhm.2007.01.010
M3 - Article
VL - 26
SP - 120
EP - 126
JO - International journal of refractory metals & hard materials
JF - International journal of refractory metals & hard materials
SN - 0263-4368
ER -