The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings

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The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings. / Wagner, Josef; Mitterer, Christian; Penoy, M. et al.
In: International journal of refractory metals & hard materials, Vol. 26, 2008, p. 120-126.

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@article{b0147d8c47f84673b162d4664ae03590,
title = "The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings",
author = "Josef Wagner and Christian Mitterer and M. Penoy and C. Michotte and Wilfried Wallgram and Martin Kathrein",
year = "2008",
doi = "10.1016/j.ijrmhm.2007.01.010",
language = "English",
volume = "26",
pages = "120--126",
journal = "International journal of refractory metals & hard materials",
issn = "0263-4368",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings

AU - Wagner, Josef

AU - Mitterer, Christian

AU - Penoy, M.

AU - Michotte, C.

AU - Wallgram, Wilfried

AU - Kathrein, Martin

PY - 2008

Y1 - 2008

U2 - 10.1016/j.ijrmhm.2007.01.010

DO - 10.1016/j.ijrmhm.2007.01.010

M3 - Article

VL - 26

SP - 120

EP - 126

JO - International journal of refractory metals & hard materials

JF - International journal of refractory metals & hard materials

SN - 0263-4368

ER -