Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source
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| Translated title of the contribution | Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source |
|---|---|
| Original language | English |
| Pages (from-to) | 6502-6507 |
| Journal | Thin solid films |
| Volume | 517 |
| Publication status | Published - 2009 |
