Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source

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Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source. / Kahn, M.; Cekada, M.; Schoeberl, T et al.
In: Thin solid films, Vol. 517, 2009, p. 6502-6507.

Research output: Contribution to journalArticleResearchpeer-review

Harvard

Kahn, M, Cekada, M, Schoeberl, T, Berghauser, R, Mitterer, C, Bauer, C, Waldhauser, W & Brandstätter, E 2009, 'Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source', Thin solid films, vol. 517, pp. 6502-6507.

APA

Kahn, M., Cekada, M., Schoeberl, T., Berghauser, R., Mitterer, C., Bauer, C., Waldhauser, W., & Brandstätter, E. (2009). Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source. Thin solid films, 517, 6502-6507.

Vancouver

Author

Kahn, M. ; Cekada, M. ; Schoeberl, T et al. / Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source. In: Thin solid films. 2009 ; Vol. 517. pp. 6502-6507.

Bibtex - Download

@article{40a4d10c4ed741a88f66ad3a91a26eab,
title = "Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source",
author = "M. Kahn and M. Cekada and T Schoeberl and R. Berghauser and Christian Mitterer and C. Bauer and W Waldhauser and E. Brandst{\"a}tter",
year = "2009",
language = "English",
volume = "517",
pages = "6502--6507",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source

AU - Kahn, M.

AU - Cekada, M.

AU - Schoeberl, T

AU - Berghauser, R.

AU - Mitterer, Christian

AU - Bauer, C.

AU - Waldhauser, W

AU - Brandstätter, E.

PY - 2009

Y1 - 2009

M3 - Article

VL - 517

SP - 6502

EP - 6507

JO - Thin solid films

JF - Thin solid films

SN - 0040-6090

ER -