Spatial distribution of plasma properties in a dc-magnetron discharge and influence of the discharge power
Research output: Contribution to conference › Poster › Research › peer-review
Standard
Spatial distribution of plasma properties in a dc-magnetron discharge and influence of the discharge power. / Saringer, Christian; Pajdarova, A. D.; Baroch, Pawel et al.
2017. Poster session presented at 44th IOP Plasma Physics Conference, Oxford, United Kingdom.
2017. Poster session presented at 44th IOP Plasma Physics Conference, Oxford, United Kingdom.
Research output: Contribution to conference › Poster › Research › peer-review
Harvard
Saringer, C, Pajdarova, AD, Baroch, P, Zorn, K, Franz, R & Mitterer, C 2017, 'Spatial distribution of plasma properties in a dc-magnetron discharge and influence of the discharge power', 44th IOP Plasma Physics Conference, Oxford, United Kingdom, 3/04/17 - 6/04/17.
APA
Saringer, C., Pajdarova, A. D., Baroch, P., Zorn, K., Franz, R., & Mitterer, C. (2017). Spatial distribution of plasma properties in a dc-magnetron discharge and influence of the discharge power. Poster session presented at 44th IOP Plasma Physics Conference, Oxford, United Kingdom.
Vancouver
Saringer C, Pajdarova AD, Baroch P, Zorn K, Franz R, Mitterer C. Spatial distribution of plasma properties in a dc-magnetron discharge and influence of the discharge power. 2017. Poster session presented at 44th IOP Plasma Physics Conference, Oxford, United Kingdom.
Author
Bibtex - Download
@conference{fb549e6c471641a49b99322dbe5b0ad6,
title = "Spatial distribution of plasma properties in a dc-magnetron discharge and influence of the discharge power",
author = "Christian Saringer and Pajdarova, {A. D.} and Pawel Baroch and Katrin Zorn and Robert Franz and Christian Mitterer",
year = "2017",
language = "English",
note = "44th IOP Plasma Physics Conference ; Conference date: 03-04-2017 Through 06-04-2017",
}
RIS (suitable for import to EndNote) - Download
TY - CONF
T1 - Spatial distribution of plasma properties in a dc-magnetron discharge and influence of the discharge power
AU - Saringer, Christian
AU - Pajdarova, A. D.
AU - Baroch, Pawel
AU - Zorn, Katrin
AU - Franz, Robert
AU - Mitterer, Christian
PY - 2017
Y1 - 2017
M3 - Poster
T2 - 44th IOP Plasma Physics Conference
Y2 - 3 April 2017 through 6 April 2017
ER -