Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Standard

Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers. / Vita, Petr; Prieling, Doris; Steiner, Helfried et al.
MAS 2011 CD-ROM Proceedings. 2011. p. 149-154.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Harvard

Vita, P, Prieling, D, Steiner, H, Gschaider, B, Junk, M, Holsteyns, F, Staudegger, F, Lechner, C & Kuhlmann, HC 2011, Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers. in MAS 2011 CD-ROM Proceedings. pp. 149-154.

APA

Vita, P., Prieling, D., Steiner, H., Gschaider, B., Junk, M., Holsteyns, F., Staudegger, F., Lechner, C., & Kuhlmann, H. C. (2011). Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers. In MAS 2011 CD-ROM Proceedings (pp. 149-154)

Vancouver

Vita P, Prieling D, Steiner H, Gschaider B, Junk M, Holsteyns F et al. Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers. In MAS 2011 CD-ROM Proceedings. 2011. p. 149-154

Author

Vita, Petr ; Prieling, Doris ; Steiner, Helfried et al. / Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers. MAS 2011 CD-ROM Proceedings. 2011. pp. 149-154

Bibtex - Download

@inproceedings{c8ae4794aeb54984a56a7db21658424d,
title = "Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers",
author = "Petr Vita and Doris Prieling and Helfried Steiner and Bernhard Gschaider and Markus Junk and Frank Holsteyns and Felix Staudegger and Christiane Lechner and Kuhlmann, {Hendrik C.}",
year = "2011",
language = "English",
isbn = "978-88-903724-5-2",
pages = "149--154",
booktitle = "MAS 2011 CD-ROM Proceedings",

}

RIS (suitable for import to EndNote) - Download

TY - GEN

T1 - Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers

AU - Vita, Petr

AU - Prieling, Doris

AU - Steiner, Helfried

AU - Gschaider, Bernhard

AU - Junk, Markus

AU - Holsteyns, Frank

AU - Staudegger, Felix

AU - Lechner, Christiane

AU - Kuhlmann, Hendrik C.

PY - 2011

Y1 - 2011

M3 - Conference contribution

SN - 978-88-903724-5-2

SP - 149

EP - 154

BT - MAS 2011 CD-ROM Proceedings

ER -