Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers
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Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers. / Vita, Petr; Prieling, Doris; Steiner, Helfried et al.
MAS 2011 CD-ROM Proceedings. 2011. S. 149-154.
MAS 2011 CD-ROM Proceedings. 2011. S. 149-154.
Publikationen: Beitrag in Buch/Bericht/Konferenzband › Beitrag in Konferenzband
Harvard
Vita, P, Prieling, D, Steiner, H, Gschaider, B, Junk, M, Holsteyns, F, Staudegger, F, Lechner, C & Kuhlmann, HC 2011, Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers. in MAS 2011 CD-ROM Proceedings. S. 149-154.
APA
Vita, P., Prieling, D., Steiner, H., Gschaider, B., Junk, M., Holsteyns, F., Staudegger, F., Lechner, C., & Kuhlmann, H. C. (2011). Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers. In MAS 2011 CD-ROM Proceedings (S. 149-154)
Vancouver
Vita P, Prieling D, Steiner H, Gschaider B, Junk M, Holsteyns F et al. Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers. in MAS 2011 CD-ROM Proceedings. 2011. S. 149-154
Author
Bibtex - Download
@inproceedings{c8ae4794aeb54984a56a7db21658424d,
title = "Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers",
author = "Petr Vita and Doris Prieling and Helfried Steiner and Bernhard Gschaider and Markus Junk and Frank Holsteyns and Felix Staudegger and Christiane Lechner and Kuhlmann, {Hendrik C.}",
year = "2011",
language = "English",
isbn = "978-88-903724-5-2",
pages = "149--154",
booktitle = "MAS 2011 CD-ROM Proceedings",
}
RIS (suitable for import to EndNote) - Download
TY - GEN
T1 - Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers
AU - Vita, Petr
AU - Prieling, Doris
AU - Steiner, Helfried
AU - Gschaider, Bernhard
AU - Junk, Markus
AU - Holsteyns, Frank
AU - Staudegger, Felix
AU - Lechner, Christiane
AU - Kuhlmann, Hendrik C.
PY - 2011
Y1 - 2011
M3 - Conference contribution
SN - 978-88-903724-5-2
SP - 149
EP - 154
BT - MAS 2011 CD-ROM Proceedings
ER -
