Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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Translated title of the contribution | Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers |
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Original language | English |
Title of host publication | MAS 2011 CD-ROM Proceedings |
Pages | 149-154 |
Publication status | Published - 2011 |