Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Authors

  • Doris Prieling
  • Helfried Steiner
  • Markus Junk
  • Frank Holsteyns
  • Felix Staudegger
  • Christiane Lechner
  • Hendrik C. Kuhlmann

Details

Translated title of the contributionSimulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers
Original languageEnglish
Title of host publicationMAS 2011 CD-ROM Proceedings
Pages149-154
Publication statusPublished - 2011