Simulation von EUV Spiegeln
Research output: Contribution to conference › Poster › Transfer
Standard
Simulation von EUV Spiegeln. / Meisels, Ronald.
2017. Poster session presented at WerWasWo. Forschung@MUL 2017, Leoben, Austria.
2017. Poster session presented at WerWasWo. Forschung@MUL 2017, Leoben, Austria.
Research output: Contribution to conference › Poster › Transfer
Harvard
Meisels, R 2017, 'Simulation von EUV Spiegeln', WerWasWo. Forschung@MUL 2017, Leoben, Austria, 13/11/17 - 28/11/17.
APA
Meisels, R. (2017). Simulation von EUV Spiegeln. Poster session presented at WerWasWo. Forschung@MUL 2017, Leoben, Austria.
Vancouver
Meisels R. Simulation von EUV Spiegeln. 2017. Poster session presented at WerWasWo. Forschung@MUL 2017, Leoben, Austria.
Author
Bibtex - Download
@conference{35149a4fa7524fe0a5c01c9486f57dd5,
title = "Simulation von EUV Spiegeln",
keywords = "EUV Lithographie ",
author = "Ronald Meisels",
year = "2017",
month = nov,
day = "15",
language = "Deutsch",
note = "WerWasWo. Forschung@MUL 2017 ; Conference date: 13-11-2017 Through 28-11-2017",
}
RIS (suitable for import to EndNote) - Download
TY - CONF
T1 - Simulation von EUV Spiegeln
AU - Meisels, Ronald
PY - 2017/11/15
Y1 - 2017/11/15
KW - EUV Lithographie
M3 - Poster
T2 - WerWasWo. Forschung@MUL 2017
Y2 - 13 November 2017 through 28 November 2017
ER -
