Großmann, B.,
Jamnig, A.,
Schalk, N.,
Czettl, C.,
Pohler, M. &
Mitterer, C.,
13 Sept 2017,
In: Journal of vacuum science & technology / A (JVST). 35.2017,
6,
6 p., 060604.
Research output: Contribution to journal › Article › Research › peer-review