Room-Temperature Deposition of DLC Films by an Ion Beam Method, Reactive Magnetron Sputtering and Pulsed Laser Deposition: Process Design, Film Structure and Film Properties
Research output: Thesis › Doctoral Thesis
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2009.
Research output: Thesis › Doctoral Thesis
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TY - BOOK
T1 - Room-Temperature Deposition of DLC Films by an Ion Beam Method, Reactive Magnetron Sputtering and Pulsed Laser Deposition
T2 - Process Design, Film Structure and Film Properties
AU - Kahn, Markus
N1 - no embargo
PY - 2009
Y1 - 2009
N2 - The aim of the present thesis was the physical vapour deposition (PVD) process development and investigation of the film structure/properties relationships of room-temperature (
AB - The aim of the present thesis was the physical vapour deposition (PVD) process development and investigation of the film structure/properties relationships of room-temperature (
KW - Amorphous Carbon Films (a-C)
KW - Physical Vapour Deposition (PVD)
KW - Magnetron Sputtering
KW - Pulsed Laser Deposition (PLD)
KW - Raman Spectroscopy
KW - amorphe Kohlenstoffschichten (a-C)
KW - physikalische Dampfphasenabscheidung (PVD)
KW - Magnetronkathoden-Zerstäuben (Sputtern)
KW - gepulste Laser Dampfphasenabscheidung (PLD)
KW - Raman Spektroskopie
M3 - Doctoral Thesis
ER -
