Room-Temperature Deposition of DLC Films by an Ion Beam Method, Reactive Magnetron Sputtering and Pulsed Laser Deposition: Process Design, Film Structure and Film Properties
Research output: Thesis › Doctoral Thesis
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Organisational units
Abstract
The aim of the present thesis was the physical vapour deposition (PVD) process development and investigation of the film structure/properties relationships of room-temperature (
Details
| Translated title of the contribution | Raum-Temperatur Abscheidung von DLC-Schichten mit einer Ionenstrahlmethode, reaktivem Magnetronkathodenzerstäuben und gepulster Laser Dampfphasenabscheidung: Prozess-Design, Schichtstruktur und Schichteigenschaften |
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| Original language | English |
| Qualification | Dr.mont. |
| Supervisors/Advisors |
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| Publication status | Published - 2009 |
