Room-Temperature Deposition of DLC Films by an Ion Beam Method, Reactive Magnetron Sputtering and Pulsed Laser Deposition: Process Design, Film Structure and Film Properties

Publikationen: Thesis / Studienabschlussarbeiten und HabilitationsschriftenDissertation

Bibtex - Download

@phdthesis{17491c7de83348ae90a19bbad0dfeb7c,
title = "Room-Temperature Deposition of DLC Films by an Ion Beam Method, Reactive Magnetron Sputtering and Pulsed Laser Deposition: Process Design, Film Structure and Film Properties",
abstract = "The aim of the present thesis was the physical vapour deposition (PVD) process development and investigation of the film structure/properties relationships of room-temperature (",
keywords = "Amorphous Carbon Films (a-C), Physical Vapour Deposition (PVD), Magnetron Sputtering, Pulsed Laser Deposition (PLD), Raman Spectroscopy, amorphe Kohlenstoffschichten (a-C), physikalische Dampfphasenabscheidung (PVD), Magnetronkathoden-Zerst{\"a}uben (Sputtern), gepulste Laser Dampfphasenabscheidung (PLD), Raman Spektroskopie",
author = "Markus Kahn",
note = "no embargo",
year = "2009",
language = "English",

}

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TY - BOOK

T1 - Room-Temperature Deposition of DLC Films by an Ion Beam Method, Reactive Magnetron Sputtering and Pulsed Laser Deposition

T2 - Process Design, Film Structure and Film Properties

AU - Kahn, Markus

N1 - no embargo

PY - 2009

Y1 - 2009

N2 - The aim of the present thesis was the physical vapour deposition (PVD) process development and investigation of the film structure/properties relationships of room-temperature (

AB - The aim of the present thesis was the physical vapour deposition (PVD) process development and investigation of the film structure/properties relationships of room-temperature (

KW - Amorphous Carbon Films (a-C)

KW - Physical Vapour Deposition (PVD)

KW - Magnetron Sputtering

KW - Pulsed Laser Deposition (PLD)

KW - Raman Spectroscopy

KW - amorphe Kohlenstoffschichten (a-C)

KW - physikalische Dampfphasenabscheidung (PVD)

KW - Magnetronkathoden-Zerstäuben (Sputtern)

KW - gepulste Laser Dampfphasenabscheidung (PLD)

KW - Raman Spektroskopie

M3 - Doctoral Thesis

ER -