Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Technische Universität Graz
- MATERIALS-Institute for Surface Technologies and Photonics
- Institute for Water Resources Management Hydrogeology and Geophysics
Details
| Original language | English |
|---|---|
| Article number | 2000319 |
| Journal | Physica Status Solidi / A, Applications and Materials Science |
| Volume | 217 |
| Issue number | 21 |
| DOIs | |
| Publication status | Published - Nov 2020 |
