Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition

Research output: Contribution to journal › Article › Research › peer-review

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Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition. / Abu Ali, Taher; Pilz, Julian; Schäffner, Philipp et al.
In: Physica Status Solidi / A, Applications and Materials Science, Vol. 217, No. 21, 2000319, 11.2020.

Research output: Contribution to journal › Article › Research › peer-review

Harvard

Abu Ali, T, Pilz, J, Schäffner, P, Kratzer, M, Teichert, C, Stadlober, B & Coclite, AM 2020, 'Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition', Physica Status Solidi / A, Applications and Materials Science, vol. 217, no. 21, 2000319. https://doi.org/10.1002/pssa.202000319

APA

Abu Ali, T., Pilz, J., Schäffner, P., Kratzer, M., Teichert, C., Stadlober, B., & Coclite, A. M. (2020). Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition. Physica Status Solidi / A, Applications and Materials Science, 217(21), Article 2000319. https://doi.org/10.1002/pssa.202000319

Vancouver

Abu Ali T, Pilz J, Schäffner P, Kratzer M, Teichert C, Stadlober B et al. Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition. Physica Status Solidi / A, Applications and Materials Science. 2020 Nov;217(21):2000319. doi: 10.1002/pssa.202000319

Author

Abu Ali, Taher ; Pilz, Julian ; Schäffner, Philipp et al. / Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition. In: Physica Status Solidi / A, Applications and Materials Science. 2020 ; Vol. 217, No. 21.

Bibtex - Download

@article{085d9858148e461eb8071c1c0c8b922c,
title = "Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition",
keywords = "atomic layer deposition, piezoelectricity, thin films, zinc oxide",
author = "{Abu Ali}, Taher and Julian Pilz and Philipp Sch{\"a}ffner and Markus Kratzer and Christian Teichert and Barbara Stadlober and Coclite, {Anna Maria}",
year = "2020",
month = nov,
doi = "10.1002/pssa.202000319",
language = "English",
volume = "217",
journal = "Physica Status Solidi / A, Applications and Materials Science",
issn = "1862-6300",
publisher = "Wiley-VCH ",
number = "21",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition

AU - Abu Ali, Taher

AU - Pilz, Julian

AU - Schäffner, Philipp

AU - Kratzer, Markus

AU - Teichert, Christian

AU - Stadlober, Barbara

AU - Coclite, Anna Maria

PY - 2020/11

Y1 - 2020/11

KW - atomic layer deposition

KW - piezoelectricity

KW - thin films

KW - zinc oxide

UR - http://www.scopus.com/inward/record.url?scp=85091301598&partnerID=8YFLogxK

U2 - 10.1002/pssa.202000319

DO - 10.1002/pssa.202000319

M3 - Article

AN - SCOPUS:85091301598

VL - 217

JO - Physica Status Solidi / A, Applications and Materials Science

JF - Physica Status Solidi / A, Applications and Materials Science

SN - 1862-6300

IS - 21

M1 - 2000319

ER -

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