Photolithographic patterning of cellulose: a versatile dual-tone photoresist for advanced applications
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In: Cellulose, Vol. Volume 22, No. Issue 1, 16.10.2014, p. 717-727.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Photolithographic patterning of cellulose: a versatile dual-tone photoresist for advanced applications
AU - Wolfberger, Archim
AU - Petritz, Andreas
AU - Fian, A.
AU - Herka, Jakob
AU - Schmidt, V.
AU - Stadlober, B.
AU - Kargl, Rupert
AU - Spirk, Stefan
AU - Grießer, Thomas
PY - 2014/10/16
Y1 - 2014/10/16
U2 - 10.1007/s10570-014-0471-4
DO - 10.1007/s10570-014-0471-4
M3 - Article
VL - Volume 22
SP - 717
EP - 727
JO - Cellulose
JF - Cellulose
SN - 0969-0239
IS - Issue 1
ER -