Photolithographic patterning of cellulose: a versatile dual-tone photoresist for advanced applications

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Photolithographic patterning of cellulose: a versatile dual-tone photoresist for advanced applications. / Wolfberger, Archim; Petritz, Andreas; Fian, A. et al.
in: Cellulose, Jahrgang Volume 22, Nr. Issue 1, 16.10.2014, S. 717-727.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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Wolfberger A, Petritz A, Fian A, Herka J, Schmidt V, Stadlober B et al. Photolithographic patterning of cellulose: a versatile dual-tone photoresist for advanced applications. Cellulose. 2014 Okt 16;Volume 22(Issue 1):717-727. doi: 10.1007/s10570-014-0471-4

Author

Wolfberger, Archim ; Petritz, Andreas ; Fian, A. et al. / Photolithographic patterning of cellulose: a versatile dual-tone photoresist for advanced applications. in: Cellulose. 2014 ; Jahrgang Volume 22, Nr. Issue 1. S. 717-727.

Bibtex - Download

@article{eb53db035fca4b56b08cf95319c76db7,
title = "Photolithographic patterning of cellulose: a versatile dual-tone photoresist for advanced applications",
author = "Archim Wolfberger and Andreas Petritz and A. Fian and Jakob Herka and V. Schmidt and B. Stadlober and Rupert Kargl and Stefan Spirk and Thomas Grie{\ss}er",
year = "2014",
month = oct,
day = "16",
doi = "10.1007/s10570-014-0471-4",
language = "English",
volume = "Volume 22",
pages = "717--727",
journal = "Cellulose",
issn = "0969-0239",
publisher = "Springer Netherlands",
number = "Issue 1",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Photolithographic patterning of cellulose: a versatile dual-tone photoresist for advanced applications

AU - Wolfberger, Archim

AU - Petritz, Andreas

AU - Fian, A.

AU - Herka, Jakob

AU - Schmidt, V.

AU - Stadlober, B.

AU - Kargl, Rupert

AU - Spirk, Stefan

AU - Grießer, Thomas

PY - 2014/10/16

Y1 - 2014/10/16

U2 - 10.1007/s10570-014-0471-4

DO - 10.1007/s10570-014-0471-4

M3 - Article

VL - Volume 22

SP - 717

EP - 727

JO - Cellulose

JF - Cellulose

SN - 0969-0239

IS - Issue 1

ER -