Oxidation and wet etching behavior of sputtered ternary molybdenum films

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Oxidation and wet etching behavior of sputtered ternary molybdenum films. / Jörg, Tanja; Hofer-Roblyek, Anna Maria; Winkler, Jörg et al.
2014. 14th IMID.

Research output: Contribution to conferencePresentationResearch

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@conference{62f5501b29e74e698f4a231a33135223,
title = "Oxidation and wet etching behavior of sputtered ternary molybdenum films",
author = "Tanja J{\"o}rg and Hofer-Roblyek, {Anna Maria} and J{\"o}rg Winkler and Christian Mitterer and Harald K{\"o}stenbauer",
year = "2014",
language = "English",
note = "14th IMID ; Conference date: 26-08-2014",

}

RIS (suitable for import to EndNote) - Download

TY - CONF

T1 - Oxidation and wet etching behavior of sputtered ternary molybdenum films

AU - Jörg, Tanja

AU - Hofer-Roblyek, Anna Maria

AU - Winkler, Jörg

AU - Mitterer, Christian

AU - Köstenbauer, Harald

PY - 2014

Y1 - 2014

M3 - Presentation

T2 - 14th IMID

Y2 - 26 August 2014

ER -