Oxidation and wet etching behavior of sputtered ternary molybdenum films
Research output: Contribution to conference › Presentation › Research
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| Original language | English |
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| Publication status | Published - 2014 |
| Event | 14th IMID - Duration: 26 Aug 2014 → … |
Conference
| Conference | 14th IMID |
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| Period | 26/08/14 → … |
