Nanoscale electrical characterization of arrowhead defects in GaInP thin films grown on Ge
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Translated title of the contribution | Nanoscale electrical characterization of arrowhead defects in GaInP thin films grown on Ge |
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Original language | English |
Pages (from-to) | C5G5-C5G10 |
Journal | Journal of vacuum science & technology / B (JVST) |
Volume | 28 |
DOIs | |
Publication status | Published - 2010 |