Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy
Research output: Contribution to conference › Poster › Research › peer-review
Authors
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Details
| Translated title of the contribution | Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy |
|---|---|
| Original language | English |
| Publication status | Published - 2005 |
| Event | 52nd Annual International Symposium of the American Vacuum Society (AVS) - Boston, United States Duration: 31 Oct 2005 → 4 Nov 2005 |
Conference
| Conference | 52nd Annual International Symposium of the American Vacuum Society (AVS) |
|---|---|
| Country/Territory | United States |
| City | Boston |
| Period | 31/10/05 → 4/11/05 |
