Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy
Research output: Contribution to conference › Poster › Research › peer-review
Standard
Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy. / Andreev, Andrei; Teichert, Christian.
2005. Poster session presented at 52nd Annual International Symposium of the American Vacuum Society (AVS), Boston, Massachusetts, United States.
2005. Poster session presented at 52nd Annual International Symposium of the American Vacuum Society (AVS), Boston, Massachusetts, United States.
Research output: Contribution to conference › Poster › Research › peer-review
Harvard
Andreev, A & Teichert, C 2005, 'Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy', 52nd Annual International Symposium of the American Vacuum Society (AVS), Boston, United States, 31/10/05 - 4/11/05.
APA
Andreev, A., & Teichert, C. (2005). Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy. Poster session presented at 52nd Annual International Symposium of the American Vacuum Society (AVS), Boston, Massachusetts, United States.
Vancouver
Andreev A, Teichert C. Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy. 2005. Poster session presented at 52nd Annual International Symposium of the American Vacuum Society (AVS), Boston, Massachusetts, United States.
Author
Bibtex - Download
@conference{e9962f0170e846deb811226cbf26c6fe,
title = "Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy",
author = "Andrei Andreev and Christian Teichert",
year = "2005",
language = "English",
note = "52nd Annual International Symposium of the American Vacuum Society (AVS) ; Conference date: 31-10-2005 Through 04-11-2005",
}
RIS (suitable for import to EndNote) - Download
TY - CONF
T1 - Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy
AU - Andreev, Andrei
AU - Teichert, Christian
PY - 2005
Y1 - 2005
M3 - Poster
T2 - 52nd Annual International Symposium of the American Vacuum Society (AVS)
Y2 - 31 October 2005 through 4 November 2005
ER -
