Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures
Research output: Contribution to journal › Article › Research › peer-review
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| Original language | English |
|---|---|
| Pages (from-to) | 1-9 |
| Number of pages | 9 |
| Journal | Journal of physics / D, Applied physics |
| Volume | 49 |
| DOIs | |
| Publication status | Published - 2016 |
