Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures

Research output: Contribution to journal › Article › Research › peer-review

Authors

Original language	English
Pages (from-to)	1-9
Number of pages	9
Journal	Journal of physics / D, Applied physics
Volume	49
DOIs	https://doi.org/doi:10.1088/0022-3727/49/2/025307
Publication status	Published - 2016