Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures

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@article{4593fc62cda94ea58dc52519fb24b154,
title = "Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures",
author = "Nina Schalk and {Simonet Fotso}, Jules and David Holec and Alexander Fian and Georg Jakopic and Velislava Terziyska and Rostislav Daniel and Christian Mitterer",
year = "2016",
doi = "doi:10.1088/0022-3727/49/2/025307",
language = "English",
volume = "49",
pages = "1--9",
journal = "Journal of physics / D, Applied physics",
issn = "0022-3727",
publisher = "IOP Publishing Ltd.",

}

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TY - JOUR

T1 - Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures

AU - Schalk, Nina

AU - Simonet Fotso, Jules

AU - Holec, David

AU - Fian, Alexander

AU - Jakopic, Georg

AU - Terziyska, Velislava

AU - Daniel, Rostislav

AU - Mitterer, Christian

PY - 2016

Y1 - 2016

U2 - doi:10.1088/0022-3727/49/2/025307

DO - doi:10.1088/0022-3727/49/2/025307

M3 - Article

VL - 49

SP - 1

EP - 9

JO - Journal of physics / D, Applied physics

JF - Journal of physics / D, Applied physics

SN - 0022-3727

ER -