MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors
Research output: Contribution to journal › Conference article › peer-review
Authors
External Organisational units
- Infineon Technologies Austria AG, Graz
- Institute of Materials Science and Technology
Details
| Original language | English |
|---|---|
| Pages (from-to) | 49-54 |
| Number of pages | 6 |
| Journal | IFAC-PapersOnLine |
| Volume | 52 |
| Issue number | 15 |
| DOIs | |
| Publication status | Published - Sept 2019 |
| Externally published | Yes |
| Event | 8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019 - Vienna, Austria Duration: 4 Sept 2019 → 6 Sept 2019 |
