MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors

Research output: Contribution to journal › Conference article › peer-review

Standard

MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors. / Han Woong, Yoo; Brunner, David; Thurner, Thomas et al.
In: IFAC-PapersOnLine, Vol. 52, No. 15, 09.2019, p. 49-54.

Research output: Contribution to journal › Conference article › peer-review

Harvard

Han Woong, Y, Brunner, D, Thurner, T & Schitter, G 2019, 'MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors', IFAC-PapersOnLine, vol. 52, no. 15, pp. 49-54. https://doi.org/10.1016/j.ifacol.2019.11.648

APA

Han Woong, Y., Brunner, D., Thurner, T., & Schitter, G. (2019). MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors. IFAC-PapersOnLine, 52(15), 49-54. https://doi.org/10.1016/j.ifacol.2019.11.648

Vancouver

Han Woong Y, Brunner D, Thurner T, Schitter G. MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors. IFAC-PapersOnLine. 2019 Sept;52(15):49-54. doi: 10.1016/j.ifacol.2019.11.648

Author

Han Woong, Yoo ; Brunner, David ; Thurner, Thomas et al. / MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors. In: IFAC-PapersOnLine. 2019 ; Vol. 52, No. 15. pp. 49-54.

Bibtex - Download

@article{6bbf33aad95f4f6cb8d27939d0aa25ca,
title = "MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors",
keywords = "Characterization, MEMS mirror, Metrology, Microelectromechanical systems (MEMS), Uncertainty analysis",
author = "{Han Woong}, Yoo and David Brunner and Thomas Thurner and Georg Schitter",
note = "Publisher Copyright: {\textcopyright} 2019, IFAC (International Federation of Automatic Control) Hosting by Elsevier Ltd. All rights reserved.; 8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019 ; Conference date: 04-09-2019 Through 06-09-2019",
year = "2019",
month = sep,
doi = "10.1016/j.ifacol.2019.11.648",
language = "English",
volume = "52",
pages = "49--54",
journal = "IFAC-PapersOnLine",
issn = "2405-8963",
publisher = "IFAC Secretariat",
number = "15",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors

AU - Han Woong, Yoo

AU - Brunner, David

AU - Thurner, Thomas

AU - Schitter, Georg

N1 - Publisher Copyright: © 2019, IFAC (International Federation of Automatic Control) Hosting by Elsevier Ltd. All rights reserved.

PY - 2019/9

Y1 - 2019/9

KW - Characterization

KW - MEMS mirror

KW - Metrology

KW - Microelectromechanical systems (MEMS)

KW - Uncertainty analysis

UR - http://www.scopus.com/inward/record.url?scp=85077498382&partnerID=8YFLogxK

U2 - 10.1016/j.ifacol.2019.11.648

DO - 10.1016/j.ifacol.2019.11.648

M3 - Conference article

AN - SCOPUS:85077498382

VL - 52

SP - 49

EP - 54

JO - IFAC-PapersOnLine

JF - IFAC-PapersOnLine

SN - 2405-8963

IS - 15

T2 - 8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019

Y2 - 4 September 2019 through 6 September 2019

ER -

View graph of relations

SFX

Publication SFX

By the same authors

View more