Mechanical properties of homogeneous and nitrogen graded TiN thin films

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Mechanical properties of homogeneous and nitrogen graded TiN thin films. / Silva, Felipe C; Tunes, Matheus A; Sagás, Julio C et al.
In: Thin solid films, Vol. 710, 138268, 30.09.2020, p. 138268.

Research output: Contribution to journalArticleResearchpeer-review

Harvard

Silva, FC, Tunes, MA, Sagás, JC, Fontana, LC, de Lima, NB & Schön, CG 2020, 'Mechanical properties of homogeneous and nitrogen graded TiN thin films', Thin solid films, vol. 710, 138268, pp. 138268. https://doi.org/10.1016/j.tsf.2020.138268

APA

Silva, F. C., Tunes, M. A., Sagás, J. C., Fontana, L. C., de Lima, N. B., & Schön, C. G. (2020). Mechanical properties of homogeneous and nitrogen graded TiN thin films. Thin solid films, 710, 138268. Article 138268. https://doi.org/10.1016/j.tsf.2020.138268

Vancouver

Silva FC, Tunes MA, Sagás JC, Fontana LC, de Lima NB, Schön CG. Mechanical properties of homogeneous and nitrogen graded TiN thin films. Thin solid films. 2020 Sept 30;710:138268. 138268. doi: 10.1016/j.tsf.2020.138268

Author

Silva, Felipe C ; Tunes, Matheus A ; Sagás, Julio C et al. / Mechanical properties of homogeneous and nitrogen graded TiN thin films. In: Thin solid films. 2020 ; Vol. 710. pp. 138268.

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@article{70841067006e42b2931b55ccaace095c,
title = "Mechanical properties of homogeneous and nitrogen graded TiN thin films",
keywords = "Ceramics, Characterization, Coatings, Fracture behavior, Stress measurements, X-ray analysis",
author = "Silva, {Felipe C} and Tunes, {Matheus A} and Sag{\'a}s, {Julio C} and Fontana, {Luis C} and {de Lima}, {Nelson B} and Sch{\"o}n, {Cl{\'a}udio G}",
year = "2020",
month = sep,
day = "30",
doi = "10.1016/j.tsf.2020.138268",
language = "English",
volume = "710",
pages = "138268",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Mechanical properties of homogeneous and nitrogen graded TiN thin films

AU - Silva, Felipe C

AU - Tunes, Matheus A

AU - Sagás, Julio C

AU - Fontana, Luis C

AU - de Lima, Nelson B

AU - Schön, Cláudio G

PY - 2020/9/30

Y1 - 2020/9/30

KW - Ceramics

KW - Characterization

KW - Coatings

KW - Fracture behavior

KW - Stress measurements

KW - X-ray analysis

UR - http://www.scopus.com/inward/record.url?scp=85089210586&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2020.138268

DO - 10.1016/j.tsf.2020.138268

M3 - Article

VL - 710

SP - 138268

JO - Thin solid films

JF - Thin solid films

SN - 0040-6090

M1 - 138268

ER -