Mechanical properties of homogeneous and nitrogen graded TiN thin films
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in: Thin solid films, Jahrgang 710, 138268, 30.09.2020, S. 138268.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Mechanical properties of homogeneous and nitrogen graded TiN thin films
AU - Silva, Felipe C
AU - Tunes, Matheus A
AU - Sagás, Julio C
AU - Fontana, Luis C
AU - de Lima, Nelson B
AU - Schön, Cláudio G
PY - 2020/9/30
Y1 - 2020/9/30
KW - Ceramics
KW - Characterization
KW - Coatings
KW - Fracture behavior
KW - Stress measurements
KW - X-ray analysis
UR - http://www.scopus.com/inward/record.url?scp=85089210586&partnerID=8YFLogxK
U2 - 10.1016/j.tsf.2020.138268
DO - 10.1016/j.tsf.2020.138268
M3 - Article
VL - 710
SP - 138268
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
M1 - 138268
ER -