Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen and oxygen
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| Translated title of the contribution | Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen and oxygen |
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| Original language | English |
| Pages (from-to) | 1929-1937 |
| Journal | IEEE Transactions on Plasma Science |
| Volume | 41 |
| DOIs | |
| Publication status | Published - 2013 |
