Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen and oxygen

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Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen and oxygen. / Franz, Robert; Polcik, Peter; Anders, A.
In: IEEE Transactions on Plasma Science, Vol. 41, 2013, p. 1929-1937.

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@article{e3739de57f9d45b6a332b2b5d02e675f,
title = "Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen and oxygen",
author = "Robert Franz and Peter Polcik and A. Anders",
year = "2013",
doi = "10.1109/TPS.2013.2254135",
language = "English",
volume = "41",
pages = "1929--1937",
journal = "IEEE Transactions on Plasma Science",
issn = "0093-3813",
publisher = "Institute of Electrical and Electronics Engineers",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen and oxygen

AU - Franz, Robert

AU - Polcik, Peter

AU - Anders, A.

PY - 2013

Y1 - 2013

U2 - 10.1109/TPS.2013.2254135

DO - 10.1109/TPS.2013.2254135

M3 - Article

VL - 41

SP - 1929

EP - 1937

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

SN - 0093-3813

ER -