Ion bombardment induced morphology modifications on self-organized semiconductor surfaces

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Authors

Translated title of the contribution	Ion bombardment induced morphology modifications on self-organized semiconductor surfaces
Original language	English
Pages (from-to)	178-184
Journal	Nuclear instruments & methods in physics research / B Beam interactions with materials and atoms
Volume	216
DOIs	https://doi.org/10.1016/j.nimb.2003.11.076
Publication status	Published - 2004