Investigation of high cyclic fatigue behaviour of thin copper films using MEMS structure

Research output: Contribution to journalArticleResearchpeer-review

Authors

  • F. Saghaeian
  • M. Lederer
  • A. Hofer
  • J. Todt
  • G. Khatibi

Organisational units

External Organisational units

  • Institute of Materials Science and Technology
  • Infineon Technologies AG Austria
  • Erich Schmid Institute of Materials Science

Details

Original languageEnglish
Article number105179
Number of pages8
JournalInternational Journal of Fatigue
Volume128.2019
Issue numberNovember
Early online date28 Jun 2019
DOIs
Publication statusPublished - 19 Jul 2019