Investigation of high cyclic fatigue behaviour of thin copper films using MEMS structure
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In: International Journal of Fatigue, Vol. 128.2019, No. November, 105179, 19.07.2019.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Investigation of high cyclic fatigue behaviour of thin copper films using MEMS structure
AU - Saghaeian, F.
AU - Lederer, M.
AU - Hofer, A.
AU - Todt, J.
AU - Keckes, J.
AU - Khatibi, G.
PY - 2019/7/19
Y1 - 2019/7/19
KW - Electronic material
KW - High cycle fatigue
KW - MEMS
KW - Microstructures
KW - Reliability
UR - http://www.scopus.com/inward/record.url?scp=85068418395&partnerID=8YFLogxK
U2 - 10.1016/j.ijfatigue.2019.06.039
DO - 10.1016/j.ijfatigue.2019.06.039
M3 - Article
AN - SCOPUS:85068418395
VL - 128.2019
JO - International Journal of Fatigue
JF - International Journal of Fatigue
SN - 0142-1123
IS - November
M1 - 105179
ER -