Instrumentation for the 3D measurement of circular disks and the quantification of warpage

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Authors

Translated title of the contribution	Instrumentation for the 3D measurement of circular disks and the quantification of warpage
Original language	English
Title of host publication	Proceedings of I2MTC 2013
Pages	146-150
DOIs	https://doi.org/10.1109/I2MTC.2013.6555399
Publication status	Published - 2013