Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films
Research output: Contribution to journal › Article › Research › peer-review
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Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films. / Lackner, Juergen; Waldhauser, Wolfgang; Berghauser, R. et al.
In: Surface & coatings technology, Vol. 192, 2005, p. 225-230.
In: Surface & coatings technology, Vol. 192, 2005, p. 225-230.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Lackner, J, Waldhauser, W, Berghauser, R, Ebner, R, Beutl, M, Jakopic, G, Leising, G, Hutter, H, Rosner, M & Schöberl, T 2005, 'Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films', Surface & coatings technology, vol. 192, pp. 225-230. https://doi.org/10.1016/j.surfcoat.2004.04.080
APA
Lackner, J., Waldhauser, W., Berghauser, R., Ebner, R., Beutl, M., Jakopic, G., Leising, G., Hutter, H., Rosner, M., & Schöberl, T. (2005). Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films. Surface & coatings technology, 192, 225-230. https://doi.org/10.1016/j.surfcoat.2004.04.080
Vancouver
Lackner J, Waldhauser W, Berghauser R, Ebner R, Beutl M, Jakopic G et al. Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films. Surface & coatings technology. 2005;192:225-230. doi: 10.1016/j.surfcoat.2004.04.080
Author
Bibtex - Download
@article{7144c205a39745779491840addf274ea,
title = "Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films",
author = "Juergen Lackner and Wolfgang Waldhauser and R. Berghauser and Reinhold Ebner and M. Beutl and G. Jakopic and G. Leising and H. Hutter and M. Rosner and Thomas Sch{\"o}berl",
year = "2005",
doi = "10.1016/j.surfcoat.2004.04.080",
language = "English",
volume = "192",
pages = "225--230",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films
AU - Lackner, Juergen
AU - Waldhauser, Wolfgang
AU - Berghauser, R.
AU - Ebner, Reinhold
AU - Beutl, M.
AU - Jakopic, G.
AU - Leising, G.
AU - Hutter, H.
AU - Rosner, M.
AU - Schöberl, Thomas
PY - 2005
Y1 - 2005
U2 - 10.1016/j.surfcoat.2004.04.080
DO - 10.1016/j.surfcoat.2004.04.080
M3 - Article
VL - 192
SP - 225
EP - 230
JO - Surface & coatings technology
JF - Surface & coatings technology
SN - 0257-8972
ER -
