Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films
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| Translated title of the contribution | Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films |
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| Original language | English |
| Pages (from-to) | 225-230 |
| Journal | Surface & coatings technology |
| Volume | 192 |
| DOIs | |
| Publication status | Published - 2005 |
