Influence of the N2 partial pressure on structure and properties of Zr1-xAlxN thin films
Research output: Contribution to conference › Poster › Research › peer-review
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| Translated title of the contribution | Influence of the N2 partial pressure on structure and properties of Zr1-xAlxN thin films |
|---|---|
| Original language | English |
| Publication status | Published - 2012 |
| Event | PSE 2012 - Garmisch-Partenkirchen, Germany Duration: 10 Sept 2012 → 14 Sept 2012 |
Conference
| Conference | PSE 2012 |
|---|---|
| Abbreviated title | PSE2012 |
| Country/Territory | Germany |
| City | Garmisch-Partenkirchen |
| Period | 10/09/12 → 14/09/12 |
