Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings
Research output: Contribution to journal › Article › Research › peer-review
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Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings. / Paulitsch, Jörg; Rachbauer, R.; Ramm, J. et al.
In: Vacuum, Vol. 100, 2014, p. 29-32.
In: Vacuum, Vol. 100, 2014, p. 29-32.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Paulitsch, J, Rachbauer, R, Ramm, J, Polcik, P & Mayrhofer, PH 2014, 'Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings', Vacuum, vol. 100, pp. 29-32. https://doi.org/10.1016/j.vacuum.2013.06.008
APA
Paulitsch, J., Rachbauer, R., Ramm, J., Polcik, P., & Mayrhofer, P. H. (2014). Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings. Vacuum, 100, 29-32. https://doi.org/10.1016/j.vacuum.2013.06.008
Vancouver
Paulitsch J, Rachbauer R, Ramm J, Polcik P, Mayrhofer PH. Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings. Vacuum. 2014;100:29-32. doi: 10.1016/j.vacuum.2013.06.008
Author
Bibtex - Download
@article{4e3f96d2ae82464fb432e13182f92845,
title = "Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings",
author = "J{\"o}rg Paulitsch and R. Rachbauer and J. Ramm and P. Polcik and P.H. Mayrhofer",
year = "2014",
doi = "10.1016/j.vacuum.2013.06.008",
language = "English",
volume = "100",
pages = "29--32",
journal = "Vacuum",
issn = "0042-207X",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings
AU - Paulitsch, Jörg
AU - Rachbauer, R.
AU - Ramm, J.
AU - Polcik, P.
AU - Mayrhofer, P.H.
PY - 2014
Y1 - 2014
U2 - 10.1016/j.vacuum.2013.06.008
DO - 10.1016/j.vacuum.2013.06.008
M3 - Article
VL - 100
SP - 29
EP - 32
JO - Vacuum
JF - Vacuum
SN - 0042-207X
ER -
