Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Standard

Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings. / Paulitsch, Jörg; Rachbauer, R.; Ramm, J. et al.
in: Vacuum, Jahrgang 100, 2014, S. 29-32.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Vancouver

Paulitsch J, Rachbauer R, Ramm J, Polcik P, Mayrhofer PH. Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings. Vacuum. 2014;100:29-32. doi: 10.1016/j.vacuum.2013.06.008

Author

Bibtex - Download

@article{4e3f96d2ae82464fb432e13182f92845,
title = "Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings",
author = "J{\"o}rg Paulitsch and R. Rachbauer and J. Ramm and P. Polcik and P.H. Mayrhofer",
year = "2014",
doi = "10.1016/j.vacuum.2013.06.008",
language = "English",
volume = "100",
pages = "29--32",
journal = "Vacuum",
issn = "0042-207X",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings

AU - Paulitsch, Jörg

AU - Rachbauer, R.

AU - Ramm, J.

AU - Polcik, P.

AU - Mayrhofer, P.H.

PY - 2014

Y1 - 2014

U2 - 10.1016/j.vacuum.2013.06.008

DO - 10.1016/j.vacuum.2013.06.008

M3 - Article

VL - 100

SP - 29

EP - 32

JO - Vacuum

JF - Vacuum

SN - 0042-207X

ER -