Influence of bipolar pulsed DC magnetron sputtering on elemental composition and micro-structure of Ti-Al-Y-N thin films
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| Translated title of the contribution | Influence of bipolar pulsed DC magnetron sputtering on elemental composition and micro-structure of Ti-Al-Y-N thin films |
|---|---|
| Original language | English |
| Pages (from-to) | 148-155 |
| Journal | Surface & coatings technology |
| Volume | 203 |
| Publication status | Published - 2008 |
