Influence of bipolar pulsed DC magnetron sputtering on elemental composition and micro-structure of Ti-Al-Y-N thin films
Research output: Contribution to journal › Article › Research › peer-review
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Influence of bipolar pulsed DC magnetron sputtering on elemental composition and micro-structure of Ti-Al-Y-N thin films. / Moser, Martin; Mayrhofer, Paul Heinz; Székely, L et al.
In: Surface & coatings technology, Vol. 203, 2008, p. 148-155.
In: Surface & coatings technology, Vol. 203, 2008, p. 148-155.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Moser, M, Mayrhofer, PH, Székely, L, Sáfrán, G & Barna, PB 2008, 'Influence of bipolar pulsed DC magnetron sputtering on elemental composition and micro-structure of Ti-Al-Y-N thin films', Surface & coatings technology, vol. 203, pp. 148-155.
APA
Moser, M., Mayrhofer, P. H., Székely, L., Sáfrán, G., & Barna, P. B. (2008). Influence of bipolar pulsed DC magnetron sputtering on elemental composition and micro-structure of Ti-Al-Y-N thin films. Surface & coatings technology, 203, 148-155.
Vancouver
Moser M, Mayrhofer PH, Székely L, Sáfrán G, Barna PB. Influence of bipolar pulsed DC magnetron sputtering on elemental composition and micro-structure of Ti-Al-Y-N thin films. Surface & coatings technology. 2008;203:148-155.
Author
Bibtex - Download
@article{0ecf1d361d31490ca226acca5daa7e17,
title = "Influence of bipolar pulsed DC magnetron sputtering on elemental composition and micro-structure of Ti-Al-Y-N thin films",
author = "Martin Moser and Mayrhofer, {Paul Heinz} and L Sz{\'e}kely and G S{\'a}fr{\'a}n and P.B. Barna",
year = "2008",
language = "English",
volume = "203",
pages = "148--155",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Influence of bipolar pulsed DC magnetron sputtering on elemental composition and micro-structure of Ti-Al-Y-N thin films
AU - Moser, Martin
AU - Mayrhofer, Paul Heinz
AU - Székely, L
AU - Sáfrán, G
AU - Barna, P.B.
PY - 2008
Y1 - 2008
M3 - Article
VL - 203
SP - 148
EP - 155
JO - Surface & coatings technology
JF - Surface & coatings technology
SN - 0257-8972
ER -
